Japan Intellectual Property Rights: PLASMA TREATMENT APPARATUS, AND PLASMA TREATMENT METHOD

Japan, July 14 -- KOMIYAMA ELECTRON CO LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS, AND PLASMA TREATMENT METHOD.' Other related details are as follows:

Application Number: JP,2020-181110

Category (FI): H05H1/46@A,C23C14/02@A

Stage: PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus and plasma treatment method capable of improving wettability of a surface of a resin to enhance adhesion of the resin.SOLUTION: A plasma treatment apparatus that irradiates a surface of a resin 1 with plasma to improve wettability of the surface includes a holding unit 4 to hold the resin 1, a moving unit 5 attached to the holding unit 4 to reciprocate the holding unit 4 along a predetermined moving direction, a gas intr...