Japan, March 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-093959
Category (FI): C23C16/505,H01L21/318@B,H01L21/318@C,H01L21/31@C,H05H1/46@L,H10P14/60,101@C,H10P14/694@B,H10P14/694@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 9, 2022
Publication Date: Dec. 21, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....