Japan, Sept. 7 -- PANASONIC IP MANAGEMENT CORP has got intellectual property rights for 'PLASMA PROCESSING EQUIPMENT AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-118707
Category (FI): H05H1/46@M,H05H1/00@A,H10P50/20,103,H01L21/302,103,C23C16/505
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 26, 2022
Publication Date: Feb. 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....