Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-113291
Category (FI): C23C16/44@J,C23C16/50,H10P14/60,101@C,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 14, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....