Japan, June 16 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-211747
Category (FI): H05H1/46@M,H01L21/302,101@G,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 28, 2022
Publication Date: July 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....