Japan, March 6 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-031646
Category (FI): H10P50/20,101@M,H10P50/20,101@G,H10P50/20,101@C,H10P14/60,101@C,H05H1/46@L,H01L21/31@C,H01L21/302,101@C,H01L21/302,101@G,C23C16/44@J,C23C16/50
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 2, 2022
Publication Date: Sept. 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....