Japan, Feb. 12 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-140812
Category (FI): H01L21/302,101@D,H10P50/20,101@D,H05H1/46@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 5, 2022
Publication Date: March 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....