Japan, March 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-043524
Category (FI): H10P50/20,101@B,H05H1/46@M,H05H1/46@R,H05H1/46@A,H01L21/302,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 18, 2022
Publication Date: Sept. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....