Japan, Jan. 28 -- PANASONIC IP MANAGEMENT CORP has got intellectual property rights for 'PLASMA POTENTIAL SENSOR.' Other related details are as follows:
Application Number: JP,2022-033662
Category (FI): C23C14/52,C23C16/50,H01L21/302,101@H,H01L21/31@C,H05H1/00@A,H10P14/60,101@C,H10P50/20,101@H
Stage: Grant (IP right document published.)
Filing Date: March 4, 2022
Publication Date: Sept. 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....