Japan Intellectual Property Rights: PARTICLE DETECTION METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PARTICLE DETECTION METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-024791

Category (FI): B05C11/08,H01L21/304,648@G,H01L21/304,646,H01L21/304,643@A,H01L21/30,569@C,H01L21/30,564@D

Stage: Grant (IP right document published.)

Filing Date: Feb. 21, 2022

Publication Date: Aug. 31, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....