Japan, Oct. 29 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'ONIUM SALT, ACID DIFFUSION CONTROLLER, RESIST COMPOSITION, AND PATTERNING METHOD.' Other related details are as follows:
Application Number: JP,2022-129569
Category (FI): G03F7/20,501,G03F7/039,601,G03F7/20,521,C07C69/96@Z,C07C65/26,C07C65/21@C,C07C25/00,G03F7/038,601,G03F7/004,503@A,G03F7/004,501,C09K3/00@K,C07C211/63,C07D333/76,C07C381/12,C07D333/52,C07D327/08
Stage: Grant(IP right document published.)
Filing Date: Aug. 16, 2022
Publication Date: Feb. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....