Japan, Sept. 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'OBSERVATION DEVICE, INSPECTION DEVICE, SUBSTRATE PROCESSING APPARATUS, OBSERVATION METHOD, AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2023-085931
Category (FI): H01L21/306@R,H01L21/66@P,H01L21/304,643@A,H01L21/304,648@G,H10P50/60@R,H10P70/00,103@A,H10P70/00,108@G,H10P74/20@P
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 25, 2023
Publication Date: Dec. 5, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....