Japan, June 10 -- EGTM CO LTD has got intellectual property rights for 'NIOBIUM PRECURSOR COMPOUND FOR THIN FILM DEPOSITION AND METHOD OF FORMING THIN FILM CONTAINING NIOBIUM USING THE SAME.' Other related details are as follows:
Application Number: JP,2022-085765
Category (FI): C23C16/40,C23C16/455,C07F9/00@Z,C07F17/00
Stage: Grant (IP right document published.)
Filing Date: May 26, 2022
Publication Date: March 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....