Japan, Sept. 18 -- HORON:KK has got intellectual property rights for 'MULTI-BEAM IMAGE GENERATING DEVICE AND MULTI-BEAM IMAGE GENERATING METHOD.' Other related details are as follows:
Application Number: JP,2025-185265
Category (FI): H01J37/28@B,H01J37/20@D,H01J37/22,502@H
Stage: PURPOSE: To acquire image information by irradiating a sample with a plurality of primary electron beams, to synthesize the image information into one image, and to acquire the image at high speed, in a multibeam image generation device and a multibeam image generation method.CONSTITUTION: This device is provided with an interferometer for measuring the position in the moving direction and the position in the orthogonal direction of a sample in real time, a corr...