Japan, March 27 -- ABIT TECHNOLOGIES CO LTD has got intellectual property rights for 'MICROWAVE PLASMA GENERATION DEVICE, MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE PLASMA PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-032111
Category (FI): H01L21/302,101@D,H05H1/46@B,H10P50/20,101@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 2, 2022
Publication Date: Sept. 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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