Japan, March 23 -- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE has got intellectual property rights for 'METHOD TO IMPROVE PROFILE CONTROL DURING SELECTIVE ETCHING OF SILICON NITRIDE SPACER.' Other related details are as follows:

Application Number: JP,2024-186670

Category (FI): H01L21/302,105@B,H10P50/20,105@B,H10P50/20,400,H10P50/28

Stage: Grant (IP right document published.)

Filing Date: Oct. 23, 2024

Publication Date: Jan. 28, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....