Japan, Sept. 3 -- ASM IP HOLDING BV has got intellectual property rights for 'METHOD OF FORMING ENHANCED UNEXPOSED PHOTORESIST LAYER.' Other related details are as follows:

Application Number: JP,2023-162907

Category (FI): G03F7/20,503,H10P76/20,G03F7/38,501,G03F7/20,521

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 26, 2023

Publication Date: Dec. 5, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....