Japan, June 10 -- BASF SE has got intellectual property rights for 'METHOD FOR USE OF COMPOSITION COMPRISING SOLVENT MIXTURE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIAL WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW.' Other related details are as follows:
Application Number: JP,2024-042534
Category (FI): G03F7/32,501
Stage: Grant (IP right document published.)
Filing Date: March 18, 2024
Publication Date: June 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....