Japan, June 10 -- BASF SE has got intellectual property rights for 'METHOD FOR USE OF COMPOSITION COMPRISING SOLVENT MIXTURE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIAL WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW.' Other related details are as follows:

Application Number: JP,2024-042534

Category (FI): G03F7/32,501

Stage: Grant (IP right document published.)

Filing Date: March 18, 2024

Publication Date: June 11, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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