Japan, Sept. 3 -- EBARA CORP has got intellectual property rights for 'METHOD FOR SWELLING ELASTIC FILM OF POLISHING HEAD AND POLISHING HEAD SYSTEM.' Other related details are as follows:
Application Number: JP,2023-028037
Category (FI): H10P52/40,H10P52/00@E,H01L21/304,622@R,B24B49/08,H01L21/304,621@D,B24B37/30@E,H10P52/00@U
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 27, 2023
Publication Date: Sept. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....