Japan, Jan. 28 -- TOKYO ELECTRON LTD,TOKAI NATIONAL HIGHER EDUCATION & RESEARCH SYSTEM has got intellectual property rights for 'METHOD FOR FORMING CARBON FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2021-212935
Category (FI): C23C14/06@F,C23C16/26,H01L21/302,105@A,H01L21/31@B,H10P14/60,101@B,H10P50/20,105@A,H10P50/28
Stage: Grant (IP right document published.)
Filing Date: Dec. 27, 2021
Publication Date: July 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....