Japan, Oct. 27 -- ASM IP HOLDING BV has got intellectual property rights for 'METHOD FOR DEPOSITING HAFNIUM LANTHANUM OXIDE FILM ON SUBSTRATE BY CIRCULATION DEPOSITION PROCESS IN REACTION CHAMBER.' Other related details are as follows:
Application Number: JP,2024-135191
Category (FI): C23C16/455,H01L21/316@X,H10P14/692@X,C23C16/40
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 14, 2024
Publication Date: Nov. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....