Japan Intellectual Property Rights: METHOD AND SYSTEM FOR AUTOMATED FREQUENCY TUNING OF RADIOFREQUENCY (RF) SIGNAL GENERATOR FOR MULTI-LEVEL RF POWER PULSING

Japan, Oct. 30 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'METHOD AND SYSTEM FOR AUTOMATED FREQUENCY TUNING OF RADIOFREQUENCY (RF) SIGNAL GENERATOR FOR MULTI-LEVEL RF POWER PULSING.' Other related details are as follows:

Application Number: JP,2025-005104

Category (FI): H05H1/46@R,H01L21/302,101@C,H01L21/302,101@B

Stage: Grant (IP right document published.)

Filing Date: Jan. 15

Publication Date: April 10

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....