Japan, Jan. 28 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA.' Other related details are as follows:
Application Number: JP,2024-030987
Category (FI): G03F1/84,G01N21/956@A
Stage: Grant (IP right document published.)
Filing Date: March 1, 2024
Publication Date: Sept. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....