Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'METHOD AND DEVICE FOR FORMING TITANIUM FILM.' Other related details are as follows:

Application Number: JP,2021-164248

Category (FI): C23C16/14,C23C16/515,C23C16/56,H01L21/285@C,H10P14/43

Stage: Grant (IP right document published.)

Filing Date: Oct. 5, 2021

Publication Date: April 17, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....