Japan, Oct. 7 -- AXUS TECHNOLOGY LLC has got intellectual property rights for 'METHOD AND APPARATUS FOR IN SITU ADJUSTMENT OF WAFER SLIP DETECTION DURING WORKPIECE POLISHING.' Other related details are as follows:
Application Number: JP,2024-201338
Category (FI): B24B37/10,H10P52/00@U,H10P52/40,B24B49/12,B24B37/005@Z,B24B37/12@D,H01L21/304,622@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 19, 2024
Publication Date: Feb. 19, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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