Japan, April 1 -- APPLIED MATERIALS INC has got intellectual property rights for 'METHOD, SYSTEM, AND DEVICE, FOR EXECUTING CALIBRATION OPERATION OF PLURALITY OF MASS FLOW AMOUNT CONTROLLERS (MFC) OF SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2024-095690
Category (FI): H10P14/24,G05D7/06@Z,H01L21/205
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 13, 2024
Publication Date: Nov. 6, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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