Japan, June 10 -- ASML NETHERLANDS BV has got intellectual property rights for 'METAL-SILICIDE NITRIDATION FOR STRESS REDUCTION.' Other related details are as follows:
Application Number: JP,2023-205496
Category (FI): G03F1/62,C23C16/42
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 5, 2023
Publication Date: Feb. 1, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....