Japan, Oct. 30 -- COORSTEK KK has got intellectual property rights for 'MEMBER FOR PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-052460
Category (FI): H01L21/302,101@G,H01L21/68@R,C04B35/117,C04B41/89@A
Stage: Grant (IP right document published.)
Filing Date: March 28, 2022
Publication Date: Oct. 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....