Japan, Feb. 27 -- DAIKIN IND LTD has got intellectual property rights for 'MEMBER, METHOD FOR PRODUCING MEMBER AND SEMICONDUCTOR PRODUCTION-RELATED DEVICE.' Other related details are as follows:
Application Number: JP,2025-023580
Category (FI): B32B9/00@Z,C23C26/00@C,H01L21/02@Z
Stage: PROBLEM TO BE SOLVED: To provide a member excellent in chemical resistance, a method for producing the member and a semiconductor production-related device.SOLUTION: There is provided a member in which at least a part of the surface of a material (a) is laminated with a carbon material, wherein the member is at least one selected from the group consisting of a building material member, a mobility member, an aerospace member, a semiconductor member and an i...