Japan, June 25 -- ULVAC JAPAN LTD has got intellectual property rights for 'MEASURING DEVICE, FILM-FORMING DEVICE, AND FILM THICKNESS MEASUREMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-125303
Category (FI): G01N5/02@A,C23C14/24@U
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 5, 2022
Publication Date: Feb. 16, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....