Japan Intellectual Property Rights: MEASUREMENT DEVICE, MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Japan, March 27 -- NIKON CORP has got intellectual property rights for 'MEASUREMENT DEVICE, MEASUREMENT METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD.' Other related details are as follows:

Application Number: JP,2024-130241

Category (FI): G01B11/00@H,G01B11/26@H,G03F7/20,501,G03F7/20,521

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 6, 2024

Publication Date: Nov. 13, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....