Japan, March 24 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR EUV MICROLITHOGRAPHY.' Other related details are as follows:

Application Number: JP,2024-068540

Category (FI): G03F1/84,G03F1/24

Stage: Grant (IP right document published.)

Filing Date: April 19, 2024

Publication Date: Oct. 31, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....