Japan, Jan. 30 -- KLA CORP has got intellectual property rights for 'MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS.' Other related details are as follows:
Application Number: JP,2024-196512
Category (FI): H10P74/20@J,H01L21/66@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 11, 2024
Publication Date: Jan. 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....