Japan, Feb. 24 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'MASK INSPECTION DEVICE AND MASK INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-006918
Category (FI): G01N21/956@A
Stage: PURPOSE: To provide an inspection device with which it is possible to suppress background reflections of a ghost image.CONSTITUTION: An inspection device 100 in one embodiment of the present invention is characterized by having: a lens array 304 for dividing inspection light into multiple rays of light upon receiving radiation of the inspection light; a lens array stage 320 for supporting the lens array and capable of moving in a plane orthogonal to the optical axis of the inspection light; an objec...