Japan, July 1 -- CANON INC has got intellectual property rights for 'MARK RELATIVE POSITION MEASURING METHOD, MEASURING DEVICE, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:

Application Number: JP,2022-142309

Category (FI): G01B11/00@C,H01L21/30,502@D,G03F9/00,H10P76/00,600

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 7, 2022

Publication Date: March 19, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....