Japan Intellectual Property Rights: MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS

Japan, June 16 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-157365

Category (FI): H10P50/20,101@D,H10D30/62,H10D30/60@X,H10D30/01,101@Z,H10D30/01,101@F,H01L29/78,301@F,H01L29/78,301@Y,H01L29/78,301@X,H01L21/302,101@D,H01L21/302,103,H01L21/302,105@Z,H10P50/20,105@Z,H10P50/20,103

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 30, 2022

Publication Date: April 11, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....