Japan, March 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'MANAGEMENT SYSTEM, MANAGEMENT METHOD AND MANAGEMENT PROGRAM.' Other related details are as follows:

Application Number: JP,2024-197331

Category (FI): G05B19/418@Z,H01L21/02@Z,H10P95/00,102@C,H10P95/00,102@E

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 12, 2024

Publication Date: Feb. 12, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....