Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'LIQUID PROCESSING DEVICE, LIQUID PROCESSING METHOD AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2022-054164
Category (FI): G03F7/30,501,H01L21/30,569@C,H01L21/304,643@A,H01L21/304,648@A,H10P70/00,103@A,H10P70/00,108@A,H10P76/00,569@C
Stage: Grant (IP right document published.)
Filing Date: March 29, 2022
Publication Date: Oct. 12, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....