Japan, Sept. 14 -- TOKYO ELECTRON LTD has got intellectual property rights for 'LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-126575
Category (FI): H10P76/00,569@C,H01L21/30,569@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 8, 2022
Publication Date: Feb. 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....