Japan, Oct. 30 -- HORIBA STEC CO LTD has got intellectual property rights for 'LIQUID MATERIAL VAPORIZER.' Other related details are as follows:
Application Number: JP,2021-153911
Category (FI): B01J4/00,103,B01J7/02@Z,C23C16/448,H01L21/31@F
Stage: Grant (IP right document published.)
Filing Date: Sept. 22, 2021
Publication Date: April 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....