Japan, Oct. 30 -- CANON INC has got intellectual property rights for 'LIGHT SOURCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2021-197806
Category (FI): F21V29/60,H01J61/52@B,G03F7/20,521,G03F7/20,501,F21Y101:00,300,F21V7/08,100,F21V5/04,650,F21V5/00,600,F21V29/503,F21S2/00,377,F21S2/00,340
Stage: Grant (IP right document published.)
Filing Date: Dec. 6, 2021
Publication Date: June 16, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....