Japan, Oct. 27 -- DISCO CORP has got intellectual property rights for 'LIFT-OFF METHOD.' Other related details are as follows:
Application Number: JP,2022-122947
Category (FI): H01L21/02@C,H01L21/68@N,H10P10/00@Z,H10P56/00@A,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 1, 2022
Publication Date: Feb. 14, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....