Japan Intellectual Property Rights: LEARNING DEVICE, INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, LEARNING METHOD, AND PROCESSING CONDITION DETERMINATION METHOD

Japan, June 16 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'LEARNING DEVICE, INFORMATION PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, LEARNING METHOD, AND PROCESSING CONDITION DETERMINATION METHOD.' Other related details are as follows:

Application Number: JP,2022-153150

Category (FI): H10P50/60@R,H01L21/306@R,G06N20/00,130

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 26, 2022

Publication Date: April 5, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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