Japan Intellectual Property Rights: LEAK DETECTION METHOD

Japan, Sept. 16 -- EBARA CORP has got intellectual property rights for 'LEAK DETECTION METHOD.' Other related details are as follows:

Application Number: JP,2022-197786

Category (FI): C25D17/06,C25D17/06@Z,C25D21/12@C,G01M3/06@G

Stage: PROBLEM TO BE SOLVED: To improve leak detection in a substrate holder in a plating device.SOLUTION: There is provided a method of detecting a leak in a substrate holder in a plating device, including putting a substrate holder holding a substrate into a tank filled with a liquid, feeding gas into the inner space of the substrate holder sealing the outer periphery of the substrate, imaging the liquid present on the periphery of the substrate holder while the inner space of the substrate holder is in a state...