Japan Intellectual Property Rights: INTEGRATED HARDWARE/SOFTWARE COMPUTER VISION SYSTEM FOR AUTONOMOUS CONTROL AND INSPECTION OF SUBSTRATE PROCESSING SYSTEM

Japan, Aug. 6 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'INTEGRATED HARDWARE/SOFTWARE COMPUTER VISION SYSTEM FOR AUTONOMOUS CONTROL AND INSPECTION OF SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2024-231644

Category (FI): H10P95/00,102@C,H10P95/00,102@E,H10P95/00,102@B,H10P72/70,H10P72/30@A,H10P50/20,101@G,H10P50/20,101@C,H01L21/302,101@G,H01L21/302,101@C,H01L21/68@N,H01L21/68@A,H01L21/02@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 27, 2024

Publication Date: April 10, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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