Japan, Sept. 9 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION SYSTEM.' Other related details are as follows:
Application Number: JP,2022-123283
Category (FI): G01R31/28@J,H01L21/66@B,H10P74/00@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 2, 2022
Publication Date: Feb. 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....