Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION METHOD, CORRECTION AMOUNT CALCULATION METHOD AND INSPECTION DEVICE.' Other related details are as follows:
Application Number: JP,2022-124206
Category (FI): G01R31/26@J,H10P74/00@B,H01L21/66@B,G01R31/28@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 3, 2022
Publication Date: June 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....