Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION DEVICE AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-056609
Category (FI): H01L21/66@B,H10P74/00@B
Stage: Grant (IP right document published.)
Filing Date: March 30, 2022
Publication Date: Oct. 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....