Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION DEVICE, INSPECTION METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-112149
Category (FI): G01R31/28@K,G01R31/319,H01L21/66@B,H10P74/00@B
Stage: Grant (IP right document published.)
Filing Date: July 13, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....