Japan Intellectual Property Rights: INDUCTIVE COIL STRUCTURE AND INDUCTIVELY COUPLED PLASMA GENERATOR

Japan, July 14 -- EN2CORE TECHNOLOGY INC has got intellectual property rights for 'INDUCTIVE COIL STRUCTURE AND INDUCTIVELY COUPLED PLASMA GENERATOR.' Other related details are as follows:

Application Number: JP,2025-061733

Category (FI): H10P50/20,101@C,H05H1/46@L,H01L21/302,101@C

Stage: PROBLEM TO BE SOLVED: To provide an inductively coupled plasma generator, in which capacitive coupling is reduced by the structure of an inductive coil and improved stability and efficiency can be achieved.SOLUTION: An inductively coupled plasma generator 100 includes: a dielectric tube 130 extending in a length direction; a first inductive coil structure 110, which is provided to enclose the dielectric tube 130 and produces inductively-coupled plasma i...